“School of Particles And Accelerator”

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Paper   IPM / Particles And Accelerator / 9549
School of Particles and Accelerator
  Title:   Langmuir Probe Measurements in a Cylindrical Magnetron Discharge in the Presence of Ar/O2
1.  K . Yasserian
2.  M . Ghoranneviss
3.  Morteza Aslaninejad
  Status:   Published
  Journal: JJAP
  Vol.:  48
  Year:  2009
  Pages:   036001-1-036001-4
  Supported by:  IPM
Langmuir probe measurements are performed in a cylindrical magnetron discharge for different ratios of argon and oxygen for various pressures and magnetic fields. Discharge voltage and plasma potential are obtained as a function of pressure for three different values of the magnetic fields in the absence of oxygen. The magnetic field impact on electron density has been measured too. Introducing oxygen into the system, discharge voltage, plasma potential, electron density and temperature as a function of partial oxygen pressure in a fixed magnetic field and constant pressure have been measured. It is shown that discharge voltage and plasma potential, are decreasing functions of pressures as well as oxygen concentration, while electron temperature increases via introducing oxygen into the system. The magnetic field gives rise to a decrease in discharge voltage and plasma potential.

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