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| Paper IPM / P / 8815 |
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| Abstract: | |||||
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Polymeric like carbon (PLC) films are grown by a capacitance
coupled RF-PECVD on the grounded
electrode at room temperature from liquid gas (40nitrogen and without nitrogen gas. Films are characterized by
X-ray photoelectron spectroscopy (XPS), atomic force microscopy
(AFM), Fourier transform infrared (FTIR) absorption and Raman
spectroscopy.
The result of FTIR analyses indicates thatmore than 90hybridization. The abundance of CH3 is more than that of
CH2 and this one is more than that of CH for carbon with
sp3 hybridization in these films. The C 1s line of the XPS
spectra is deconvoluted to several peaks that are attributed to
the CH3, CH2 and CH terminations. The result of this
deconvolution is consistent with FTIR results. AFM images show
that the mean nanoparticle size is reduced from about 100 nm for
films without nitrogen to less than 80 nm for films with nitrogen.
This is in agreement with our Raman results. By addition of
nitrogen to the feed gas, no variation in the C?H stretching
vibration mode is observed. The effect of N?H bonds is observable
in both FTIR and XPS spectra and a very small trace of N?C bonds
is present only in deconvolution of N 1s line of XPS spectra.
These results indicate that by addition of nitrogen to feed gas,
internal structure of a-C:H nanoparticles is not changed but
particle size is decreased. Wesuggest that the internal stress
reduction due to nitrogen addition in the feed gas for PLC films
can be related to decreasing of the a-C:H particle size.
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