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Paper   IPM / Physic / 8815
School of Physics
  Title:   Polymeric Like Carbon Films Prepared from Liquid Gas and the Effect of Nitrogen
1.  T. Ghodselahi
2.  M.A . Vesaghi
  Status:   Published
  Journal: Appl. Surf. Sci.
  Vol.:  online
  Year:  2008
  Supported by:  IPM
Polymeric like carbon (PLC) films are grown by a capacitance coupled RF-PECVD on the grounded electrode at room temperature from liquid gas (40nitrogen and without nitrogen gas. Films are characterized by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), Fourier transform infrared (FTIR) absorption and Raman spectroscopy. The result of FTIR analyses indicates thatmore than 90hybridization. The abundance of CH3 is more than that of CH2 and this one is more than that of CH for carbon with sp3 hybridization in these films. The C 1s line of the XPS spectra is deconvoluted to several peaks that are attributed to the CH3, CH2 and CH terminations. The result of this deconvolution is consistent with FTIR results. AFM images show that the mean nanoparticle size is reduced from about 100 nm for films without nitrogen to less than 80 nm for films with nitrogen. This is in agreement with our Raman results. By addition of nitrogen to the feed gas, no variation in the C?H stretching vibration mode is observed. The effect of N?H bonds is observable in both FTIR and XPS spectra and a very small trace of N?C bonds is present only in deconvolution of N 1s line of XPS spectra. These results indicate that by addition of nitrogen to feed gas, internal structure of a-C:H nanoparticles is not changed but particle size is decreased. Wesuggest that the internal stress reduction due to nitrogen addition in the feed gas for PLC films can be related to decreasing of the a-C:H particle size.

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