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|Paper IPM / Physic / 8580||
Ion dynamics of pulsed plasma sheath during the plasma source ion-implantation (PSII) affects the resultant surface properties and
structures. In this work, a two-dimensional fluid model is applied to the problem of computing ion dynamics in the sheath of a target with a rectangular groove. The evolution of sheath edge, x and y components of ion velocity on the target surface are simulated to describe the physics of sheath in PSII.
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