“School of Particles And Accelerator”

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Paper   IPM / Particles And Accelerator / 13585
School of Particles and Accelerator
  Title:   Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India
1.  T Aziz
2.  S.R Chendvankar
3.  G.B Mohanty
4.  M.R Patil
5.  K.K Rao
6.  Y.R Rani
7.  Y.P.P Rao
8.  Hadi Behnamian
9.  S Mersi
10.  Mohsen Naseri
  Status:   Published
  Journal: JINST
  Vol.:  P06008
  Year:  2014
  Supported by:  IPM
This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor on a four-inch wafer. After finding suitable test procedures for characterizing these AC coupled sensors, we have fine-tuned various process parameters in order to produce sensors with the desired specifications.

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