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Paper   IPM / Physic / 12125
School of Physics
  Title:   Electrical and Optical Properties of Au NPs@a-C:H Prepared by Co-Deposition of RF- Sputtering and RF-PECVD
1.  S. Hoornam
2.  T. Ghodselahi
  Status:   Preprint
  Year:  2011
  Supported by:  IPM
Au NPs@a-C:H nanocomposites were prepared by co-deposition of RF- sputtering and RF-PECVD method from Au target and acetylene gas. RF power supply of 180 W and acetylene gas pressure of 0.035 mbar with different deposition time were utilized to achieve samples with different electrical sheet resistance in the range of 1-30 M #937; and thickness of less than 10 nm. The Localized Surface Plasmon Resonance (LSPR) absorption spectra of Au NPs were recorded around 580 nm. The average size of Au NPs was estimated less than 5 nm from AFM and XRD analysis. The surface topography and the RMS roughness of the samples were obtained from AFM analysis. The alteration in electrical sheet resistance and LSPR of the samples was correlated with topography and the RMS roughness of samples surface.

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