IPM - Institute for Research in Fundamental Sciences

“School of Physic”

Paper IPM / Physic / 7662

School of Physics

Title:

High Quality Diamond Like Carbon (DLC) Films Made From Liquid Gas

Author(s):

Status:

In Proceedings

Proceeding:

First Regional Workshop on Low Temperature Plasmas and Their Applications, Tabriz, Iran, 9-13 October 2004

Year:

2004

Supported by:

IPM

Abstract:

High quality diamond like carbon (DLC) films have been deposited from liquid gas (40

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