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| Paper IPM / Physic / 15068 |
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The presented study is aimed at analyzing the surface texture of amorphous hydrogenated carbon layers containing nickel nanoparticles (Ni-NPs@a-C:H) within their structure, which were deposited by Radio Frequency (RF) sputtering and RF-Plasma Enhanced Chemical Vapor Deposition (RF-PECVD) methods on glass substrates. Prepared films were then used as research material following their annealing at two different temperatures of 250°C and 350°C in an inert argon atmosphere. Series of height samples were taken with the help of atomic force microscopy (AFM) operating in a non-contact mode and examined in order to determine their fractal characteristics. Raw AFM data were first plane-fitted to remove the surface bow exhibiting the so-called residual surface, and then numerically processed to calculate the Areal Autocorrelation Function (AACF), which was later used to compute the Structure Function (SF). The log�??log plots of the latter served for calculation of fractal properties of surfaces under investigation, including fractal dimension D, and pseudo-topothesy K. The analysis of 3-D surface texture helps to understand their essential characteristics and their implications as well as graphical models and their implementation in computer simulation.
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