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Paper   IPM / Nano-Sciences / 16914
School of Nano Science
  Title:   The effect of edge sharpness on phase-step diffractometry
1.  Morteza Siavashani
2.  Mohammad Taghy Tavasoli
3.  Ali Reza Moradi
  Status:   Published
  Journal: Optics and Lasers in Engineering
  Vol.:  145
  Year:  2021
  Pages:   106666
  Publisher(s):   Elsevier B.V.
  Supported by:  IPM
Fresnel diffractometry using a phase step, comparable to interferometry, has led to several high-precision metro- logical applications. Either in theoretical investigations or in the applications, the phase step is considered to be sharp. However, practically, fabrication of such elements is impossible and a level of bluntness is unavoidable. In this paper, we address the effect of edge sharpness on phase-step diffractometry. We show, theoretically and with simulations, that if the conjunction length is less than approximately 10

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