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Paper   IPM / P / 16133
School of Physics
  Title:   3_D surface stereometry of Ag/DLC nanocomposite prepared by RF-PECVD
  Author(s): 
1.  S. Stach
2.  S. Talu
3.  S. Abdolghaderi
4.  A. Shafiekhani
5.  J. Bahman
  Status:   Published
  Journal: Results in physics
  Vol.:  15
  Year:  2019
  Pages:   102731
  Supported by:  IPM
  Abstract:
In this study, a stereometric analysis of the three-dimensional (3-D) surfaces of the Ag/diamond-like carbon (DLC) nanocomposite films was done. The nanocomposite thin films were fabricated by Radio Frequency Plasma-Enhanced Chemical Vapour Deposition (RF-PECVD). The 3-D surface microtexture was studied by high-resolution Atomic Force Microscopy (AFM) records combined with statistical analyses. More detailed information about surface statistical parameters and topographic features of analyzed samples were performed. The statistical parameters relating to the segmented motifs consistent with ISO 25178-2: 2012 have been generated using MountainsMap® Premium software. The analysis was performed by modeling Ag/DLC nanocomposite surface microtexture based on motif analysis (detection of essential characteristics in terms of surface dimensions, volume, curvature, shape) to be included in computer interactive simulation algorithms.

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